2004•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry

Hernando Altamar-Mercado, Arturo Plata

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Abstract

The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.

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What this paper is about

The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.

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Available abstract

The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.

Key concepts: Interferometry, White light interferometry, Shearing (physics), Optics, White light, Shearing interferometer, Phase (matter), Materials science

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