Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry
Hernando Altamar-Mercado, Arturo Plata
Abstract
Hernando Altamar-Mercado, Arturo Plata
Abstract
The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.
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The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.
Key concepts: Interferometry, White light interferometry, Shearing (physics), Optics, White light, Shearing interferometer, Phase (matter), Materials science