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Shape measurements of mirror surfaces with a lateral-shearing interferometer during machine running

Takashi Nomura, Kazuhide Kamiya, Hiroshi Miyashiro, Seiichi Okuda, Hatsuzo Tashiro, Kazuo Yoshikawa

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Key concepts: Interferometry, Shearing interferometer, Optics, Shearing (physics), Fizeau interferometer, Intensity interferometer, Wavefront, Holographic interferometry

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Shape measurements of mirror surfaces with a lateral-shearing interferometer during machine running — Research Paper | ScholarLens