2003•Microelectronic EngineeringRequires access

Fabrication of 3D metallic photonic crystals by X-ray lithography

Filippo Romanato, Luca Businaro, Lisa Vaccari, Stefano Cabrini, Patrizio Candeloro, Massimo De Vittorio, A. Passaseo, Maria Teresa Todaro, R. Cingolani, Elti Cattaruzza, Mattéo Galli, C. Andreani, Enzo Di Fabrizio

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Key concepts: Fabrication, Photonic crystal, Photonics, Lithography, Materials science, Photonic metamaterial, Optoelectronics, Optics

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Fabrication of 3D metallic photonic crystals by X-ray lithography — Research Paper | ScholarLens