1999•Applied Surface ScienceRequires access

Characterization of rapid thermal processing oxynitrides by SIMS and XPS analyses

M. Bersani, L. Vanzetti, M. Sbetti, M. Anderle

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Key concepts: X-ray photoelectron spectroscopy, Secondary ion mass spectrometry, Analytical Chemistry (journal), Oxide, Materials science, Mass spectrometry, Rapid thermal processing, Characterization (materials science)