Inspection of Rotor and Stator Vibration of the Ultrasonic Motor Using Longitudinal and Torsional Vibrations

The present paper deals with some experimental inspections of vibration generated in a rotor and a stator of an ultrasonic motor using longitudinal and torsional vibrations. It is pointed out that the nonlinear phenomena of the vibration should be considered in the motor construction. The signal was picked up by adhered piezoelectric ceramics to inspect the vibration behaviors of the rotor and the stator. The signal contains some frequency components to distinguish nonlinear vibration unwanted for the motor generated in the rotor and the stator.