2012•Japanese Journal of Applied PhysicsOpen access

Low Temperature Plasma Enhanced Chemical Vapor Deposition-Synthesized Electrochromic MoOxCy Thin Films for Flexible Electrochromic Devices

Yung‐Sen Lin, Jhen-Yi Lai

Abstract

An investigation is conducted into the electrochromic organomolybdenum oxide (MoO x C y ) films synthesized onto 60 Ω/□ flexible poly(ethylene terephthalate) (PET)/indium tin oxide (ITO) substrates using low temperature (∼23 °C) plasma-enhanced chemical vapor deposition (PECVD). The PECVD-synthesized MoO x C y films are proven to offer remarkable electrochromic performance. Cyclic voltammetry switching measurements reveal that only low driving voltages from -1 to 1 V are needed to provide reversible Li+ ion intercalation and de-intercalation in a 1 M LiClO4-propylene carbonate (PC) electrolyte. Light modulation with transmittance variation of up to 65.2%, optical density change of 0.63 and coloration efficiency of 35 cm2/C are achieved at a wavelength of 608 nm for 150 cycles of Li+ intercalation and de-intercalation. PECVD-synthesized MoO x C y thin films show excellent electrochromic properties for applications in flexible electrochromic devices.

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Key concepts: Electrochromism, Electrochromic devices, Plasma-enhanced chemical vapor deposition, Materials science, Propylene carbonate, Cyclic voltammetry, Intercalation (chemistry), Thin film