2000•Sensors and Actuators A PhysicalRequires access

Hot embossing as a method for the fabrication of polymer high aspect ratio structures

Holger Becker, Ulf Heim

Open publisher page 669 citations

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Key concepts: Microfabrication, Embossing, Fabrication, Materials science, Microelectromechanical systems, Polymer, Replication (statistics), Surface micromachining