1986•Japanese Journal of Applied PhysicsOpen access
Fabrication of Planar Microlens by Transverse Electromigration Method
Hiroyuki Sugiyama, Masayoshi Kato, Shigeyoshi Misawa, Kenichi Iga
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Abstract
The fabrication of planar microlens by a transverse electromigration method has been proposed and demonstrated. The possibility of improving productivity has been obtained, while the optical properties of the resultant lens are almost equivalent to those observed by a conventional method. The N.A. and the focused spot diameter were 0.27 and 5.9 µm, respectively.
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