Estimation of a planar microlens by oblique ray tracing

Ray tracing for a planar microlens by solving a ray equation is performed. Off-axial dependence of spot size and wave aberration of fabricated planar microlens samples are estimated. A typical spherical aberration of the present planar microlenses at N.A. = 0.3 was 1.1lambda. The curvature field was -0.7lambda, and comatic aberration was 0.3lambda for a tilted angle of 5 degrees at 0.3 N.A. It was estimated that the field curvature and comatic aberration were dominant next to the spherical aberration.