ScholarLens Back to search
1982•Crystal Research and TechnologyRequires access

On the Codepositon of Silicon and Boron (II) The Influence of Traces of Water Vapour on the Codepostion of Silicon and Boron

Karl Bartsch, E. Wolf

Open publisher page 1 citations

Abstract

Abstract It has been proved experimentally that at the codeposition of silicoan and boron at low concentrations of boron, being comparable with the residual water vapour of the gases, gaseous phase reactions ake place, decreasing the incorporation of boron in the deposited silicon. Probably silioxy‐boron‐halides are formed in these reactions.

About this research paper

What this paper is about

Abstract It has been proved experimentally that at the codeposition of silicoan and boron at low concentrations of boron, being comparable with the residual water vapour of the gases, gaseous phase reactions ake place, decreasing the incorporation of boron in the deposited silicon. Probably silioxy‐boron‐halides are formed in these reactions.

Why it matters

OpenAlex reports 1 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Abstract It has been proved experimentally that at the codeposition of silicoan and boron at low concentrations of boron, being comparable with the residual water vapour of the gases, gaseous phase reactions ake place, decreasing the incorporation of boron in the deposited silicon. Probably silioxy‐boron‐halides are formed in these reactions.

Key concepts: Boron, Silicon, Halide, Inorganic chemistry, Materials science, BORO, Chemistry, Metallurgy

Related papers

Related paper 1Related paper 2
Back to paper searchBrowse research topicsOriginal source
On the Codepositon of Silicon and Boron (II) The Influence of Traces of Water Vapour on the Codepostion of Silicon and Boron — Research Paper | ScholarLens