A Planar Type Eeprom Cell Structure By Standard CMOS Process And Applications

BIOS and micro-codes for system controls are stored in EPROM or EEPROM chips and used with system control logic LSIs. Integration of EEPROM with logic LSIs, Gate Array, Standard Cell and Microprocessor bring many merits. But such integration requires EEPROM unique processing, ultra thin oxide, stacking of floating and control gates and others.