2014Journal of the Korean Society for Precision EngineeringOpen access

Current Status and Technical Issues of Ultra-precision Machine Tools

Jeong Seok Oh, Chang-Ju Kim, Chun Hong Park, Y. Choi

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Abstract

Diffractive optical elements (DOEs) ? in general a complex pattern of micro- and nano-scale structures ? can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

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Diffractive optical elements (DOEs) ? in general a complex pattern of micro- and nano-scale structures ? can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

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Available abstract

Diffractive optical elements (DOEs) ? in general a complex pattern of micro- and nano-scale structures ? can modulate and transform light in a predetermined way. Their importance is being increased nowadays because they can be designed to handle a number of simultaneous tasks. In view point of machining DOEs, it is a big challenge to fabricate micro- and nano-scale structures on a free-form surfaces. In this paper, the state-of-the-art of the ultra-precision machine tools is reviewed. Also some technical issues which determine the machine tool accuracy are discussed.

Key concepts: Machining, Point (geometry), Machine tool, Computer science, Scale (ratio), State (computer science), Engineering drawing, Mechanical engineering

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