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1986•Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsRequires access

The β-SiC(100) surface studied by low energy electron diffraction, Auger electron spectroscopy, and electron energy loss spectra

Moshe Dayan

Open publisher page 117 citations

Abstract

The β-SiC(100) surface has been studied by low energy electron diffraction (LEED), Auger electron spectroscopy (AES), high resolution electron energy loss spectra (HREELS), and core level excitation EELS. Two new Si-terminated phases have been discovered, one with (3×2) symmetry, and the other with (2×1) symmetry. Models are presented to describe these phases. New results, for the C-rich surface, are presented and discussed. In addition, core level excitation EELS results are given and compared with theory.

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What this paper is about

The β-SiC(100) surface has been studied by low energy electron diffraction (LEED), Auger electron spectroscopy (AES), high resolution electron energy loss spectra (HREELS), and core level excitation EELS. Two new Si-terminated phases have been discovered, one with (3×2) symmetry, and the other with (2×1) symmetry. Models are presented to describe these phases. New results, for the C-rich surface, are presented and discussed. In addition, core level excitation EELS results are given and compared with theory.

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Available abstract

The β-SiC(100) surface has been studied by low energy electron diffraction (LEED), Auger electron spectroscopy (AES), high resolution electron energy loss spectra (HREELS), and core level excitation EELS. Two new Si-terminated phases have been discovered, one with (3×2) symmetry, and the other with (2×1) symmetry. Models are presented to describe these phases. New results, for the C-rich surface, are presented and discussed. In addition, core level excitation EELS results are given and compared with theory.

Key concepts: Auger electron spectroscopy, Low-energy electron diffraction, Electron energy loss spectroscopy, Electron diffraction, Electron spectroscopy, Reflection high-energy electron diffraction, Spectroscopy, Atomic physics

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