2004•Journal of ElectroceramicsOpen access

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

Paul Muralt, J. Baborowski

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Key concepts: PMUT, Piezoelectricity, Capacitive micromachined ultrasonic transducers, Ultrasonic sensor, Materials science, Acoustics, Transducer, Surface micromachining

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Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films — Research Paper | ScholarLens