2008•Unpublished venueRequires access

Micromachined Ultrasonic Transducers

M. Pappalardo, Giosué Calıano, Alessandro Stuart Savoia, A. Caronti

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Key concepts: Capacitive micromachined ultrasonic transducers, PMUT, Piezoelectricity, Ultrasonic sensor, Transducer, Acoustics, Materials science, Capacitive sensing

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