1991•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Output power stabilization of a XeCl excimer laser by HCl gas injection
Satoshi Ogura, Yukio Kawakubo, Kouji Sasaki, Y. Kubota, Atsushi Miki
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Abstract
A laser output power control system which has an ability to realize high stability of the laser output power in long-term operation is proposed for high-power rare-gas halide excimer lasers. The system has a function of maintaining laser gas conditions, mainly the halogen gas concentration, constant against the gas degradation in the laser tube. As a result the laser output power is stabilized at near maximum available power. The system has been applied to a 20-W UV-preionozed XeCl excimer laser and the laser output power has been stabilized for 8 hours successfully with a fluctuation less than +/- 2% at 20 W.