1971•Journal of Physics E Scientific InstrumentsOpen access
A wide range manometer
B Hendy
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Abstract
A simple, reliable and inexpensive manometer for the measurement of gas pressures from 1 mtorr to 760 torr has been developed. It can be baked and evacuated to a base pressure of less than 10 ntorr and may thus be used in systems where high gas purity is required. It employs a stainless-steel bellows and sensitive optical lever, and considerably extends the range of previous purely mechanical instruments employing the movement of a bellows as a means of detecting pressure changes.
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