2004•Sensors and Actuators A PhysicalRequires access

Development of piezoelectric micromachined ultrasonic transducers

Firas Akasheh, Todd Myers, J. Fraser, Susmita Bose, Amit Bandyopadhyay

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Key concepts: Electromechanical coupling coefficient, Materials science, PMUT, Ultrasonic sensor, Capacitive micromachined ultrasonic transducers, Coupling coefficient of resonators, Piezoelectricity, Acoustics

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