ScholarLens Back to search
1970•Applied Physics LettersRequires access

EPITAXIAL ZnO ON SAPPHIRE

Giancarlo Galli, James Coker

Open publisher page 89 citations

Abstract

Epitaxial layers of ZnO have been deposited by chemical vapor transport on single-crystal sapphire substrates. The ZnO layers have been deposited up to thicknesses of 100μ. X-ray analysis showed that the c axis of the ZnO could be made to lie parallel to the (0112)-oriented sapphire substrate. Resistivities were generally from 1 to 10 Ω-cm but could be significantly increased by diffusion of lithium or sodium.

About this research paper

What this paper is about

Epitaxial layers of ZnO have been deposited by chemical vapor transport on single-crystal sapphire substrates. The ZnO layers have been deposited up to thicknesses of 100μ. X-ray analysis showed that the c axis of the ZnO could be made to lie parallel to the (0112)-oriented sapphire substrate. Resistivities were generally from 1 to 10 Ω-cm but could be significantly increased by diffusion of lithium or sodium.

Why it matters

OpenAlex reports 89 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Available abstract

Epitaxial layers of ZnO have been deposited by chemical vapor transport on single-crystal sapphire substrates. The ZnO layers have been deposited up to thicknesses of 100μ. X-ray analysis showed that the c axis of the ZnO could be made to lie parallel to the (0112)-oriented sapphire substrate. Resistivities were generally from 1 to 10 Ω-cm but could be significantly increased by diffusion of lithium or sodium.

Key concepts: Sapphire, Epitaxy, Materials science, Substrate (aquarium), Lithium (medication), Diffusion, Crystal (programming language), Chemical vapor deposition

Related papers

Related paper 1Related paper 2
Back to paper searchBrowse research topicsOriginal source
EPITAXIAL ZnO ON SAPPHIRE — Research Paper | ScholarLens