Ti10Sb60Te30 for phase change memory with high-temperature data retention and rapid crystallization speed
Min Zhu, Liangcai Wu, Zhitang Song, Feng Rao, Daolin Cai, Peng Cheng, Xilin Zhou, Kun Ren, Sannian Song, Bo Liu, Songlin Feng
Abstract
Min Zhu, Liangcai Wu, Zhitang Song, Feng Rao, Daolin Cai, Peng Cheng, Xilin Zhou, Kun Ren, Sannian Song, Bo Liu, Songlin Feng
Abstract
With a high crystallization temperature of 211 °C, Ti10Sb60Te30 phase change material exhibits a data retention of 10-yr at 137 °C, which is much better than that of usual Ge2Sb2Te5. No other phase is formed in Ti10Sb60Te30 film except hexagonal Sb2Te phase. For Ti10Sb60Te30-based phase change memory cell, as short as 6 ns electric pulse can fulfill the Set operation, demonstrating an extremely rapid crystallization speed of Ti10Sb60Te30. The programming cycles can reach 2.2 × 104 with very short Set/Reset pulses of 100 ns/50 ns.
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With a high crystallization temperature of 211 °C, Ti10Sb60Te30 phase change material exhibits a data retention of 10-yr at 137 °C, which is much better than that of usual Ge2Sb2Te5. No other phase is formed in Ti10Sb60Te30 film except hexagonal Sb2Te phase. For Ti10Sb60Te30-based phase change memory cell, as short as 6 ns electric pulse can fulfill the Set operation, demonstrating an extremely rapid crystallization speed of Ti10Sb60Te30. The programming cycles can reach 2.2 × 104 with very short Set/Reset pulses of 100 ns/50 ns.
Key concepts: Crystallization, Phase-change memory, Reset (finance), Data retention, Materials science, Phase (matter), Germanium compounds, Phase-change material