Inductance Properties of In Situ-Grown Horizontally Aligned Carbon Nanotubes

Kinetic inductance is an important property of carbon nanotubes (CNTs) in high-frequency applications. However, disagreements exist in whether the kinetic inductance of CNTs is present in the diffusive transport regime. In this paper, we fabricated the horizontally aligned multiwalled nanotube (MWNT) arrays on silicon substrates and investigated the inductance properties of the MWNT arrays with different lengths using direct current and radio frequency characterizations. The experimental results show that the electron transport in the CNT arrays is diffusive and that the value of the kinetic inductance is proportional to the length of the CNT arrays. We have experimentally validated that the kinetic inductance theory is applicable to CNTs in the diffusive transport regime. This paper could quell the existing disagreements about the kinetic inductance and provide insights to the potential applications of CNTs as interconnects and on-chip inductors.