Monolithic silicon waveguides in bulk silicon wafers

We demonstrate two silicon photonic technologies for fabrication of monolithic photonic devices in standard silicon. Using these technologies, we demonstrate low-loss silicon waveguides (2.34 dB/cm), double-layer 3D waveguides, and waveguide Bragg reflectors in standard silicon for optical interconnects and sensing applications. These technologies simplify integration of electronics and photonics and are possible alternatives to SOI-based technology for implementation of silicon-photonic devices and systems for optical interconnects and sensing.