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1996•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

Application of medium energy nuclear microprobe to semiconductor process steps

Mikio Takai, Takehisa Kishimoto, Ryou Mimura, Hiroshi Sawaragi, Ryuso Aihara

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Key concepts: Microprobe, Materials science, Eutectic system, Optics, Optical microscope, Analytical Chemistry (journal), Alloy, Nuclear physics

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