Mark B. H. Breese, David N. Jamieson, Philip King
Abstract
Ion-Solid Interactions Principles of the Nuclear Microprobe Microprobe Ion Optics Analytical Techniques Spatially Resolved Ion Channelling Techniques Ion Beam Induced Charge Microscopy Microelectronics Analysis Crystal Defect Imaging with a Nuclear Microprobe Other Materials Analysis and Modification.
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Ion-Solid Interactions Principles of the Nuclear Microprobe Microprobe Ion Optics Analytical Techniques Spatially Resolved Ion Channelling Techniques Ion Beam Induced Charge Microscopy Microelectronics Analysis Crystal Defect Imaging with a Nuclear Microprobe Other Materials Analysis and Modification.
Key concepts: Microprobe, Microelectronics, Ion beam analysis, Ion beam, Channelling, Ion, Materials science, Analytical Chemistry (journal)