Equilibria in the transport epitaxial formation of indium phosphide and arsenide

From the data available in literature, equilibria were calculated of the reactions which come into consideration in the preparation of indium phosphide and indium arsenide. In the first case it was supposed that indium phosphide was formed as a pure solid substance, that indium might exist either as a pure liquid, or as a gas and that the remaining 16 components in the equilibrium mixture were in the ideal gaseous state. In the second case, the formation of pure solid indium arsenide and the existence of 18 other substances in the equilibrium mixture, also in the ideal gaseous state, were supposed. The results of these theoretical calculations for indium phosphide were compared with the experimental deposition temperatures and reasonable agreement has been found.