2000•Sensors and Actuators A PhysicalOpen access

Integration of through-wafer interconnects with a two-dimensional cantilever array

Eugene M. Chow, Hyongsok Tom Soh, H.C Lee, Jonathan D. Adams, Stephen C. Minne, Goksen Goksenin Yaralioglu, A. Atalar, C. F. Quate, Thomas William Kenny

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Key concepts: Cantilever, Piezoresistive effect, Wafer, Materials science, Deflection (physics), Fabrication, Optoelectronics, Microelectromechanical systems

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Integration of through-wafer interconnects with a two-dimensional cantilever array — Research Paper | ScholarLens