1997•Surface and Coatings TechnologyRequires access

Lateral implantation homogeneity of wedge-shaped samples treated by plasma immersion ion implantation

Wolfgang Ensinger, T. Höchbauer, B. Rauschenbach

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Key concepts: Materials science, Plasma-immersion ion implantation, Ion implantation, Homogeneity (statistics), Wedge (geometry), Plasma, Immersion (mathematics), Ion

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