2009•Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated EquipmentRequires access

Stitching-angle measurable microscopic-interferometer: Surface-figure metrology tool for hard X-ray nanofocusing mirrors with large curvature

Hirokatsu Yumoto, Hidekazu Mimura, Soichiro Handa, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Haruhiko Ohashi, Kazuto Yamauchi, Tetsuya Ishikawa

Open publisher page 25 citations

Abstract

This record does not include an abstract. Use the full-text link above if available.

About this research paper

What this paper is about

An abstract is not available in the OpenAlex record for this paper.

Why it matters

OpenAlex reports 25 citations for this work. Citation counts describe recorded attention and do not establish research quality.

Key contribution

A contribution statement is not available in the OpenAlex record.

Method / approach

Method details are not available in the OpenAlex metadata.

Main findings

Findings are not separately available in the OpenAlex metadata.

Limitations

Limitations are not available in the OpenAlex metadata.

Applications

Application details are not available in the OpenAlex metadata.

Key concepts: Image stitching, Metrology, Interferometry, Optics, Surface metrology, Profilometer, Astronomical interferometer, Dimensional metrology