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2021•Applied Physics BRequires access

All-digital 3-dimensional profilometry of nano-scaled surfaces with spatial light modulators

Valeria Rodríguez-Fajardo, Carmelo Rosales‐Guzmán, Othmane Mouane, Daniel Wamwangi, E. Sideras‐Haddad, Filippus S. Roux, Andrew Forbes

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Key concepts: Profilometer, Metrology, Surface metrology, Interferometry, Optics, Nanometrology, Materials science, Spatial light modulator

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