2008•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

The use of HI-ERDA/RBS and NRA/RBS to depth profile N in GaAs1−N thin films

Richard W. Smith, J. Plaza, D. Ghiţǎ, M. Sánchez, B.J. Garcı́a, A. Muñoz-Martín, A. Climent‐Font

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Key concepts: Elastic recoil detection, Nuclear reaction analysis, Rutherford backscattering spectrometry, Ion beam analysis, Analytical Chemistry (journal), Materials science, Beam (structure), Range (aeronautics)

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The use of HI-ERDA/RBS and NRA/RBS to depth profile N in GaAs1−N thin films — Research Paper | ScholarLens