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2009•Current Applied PhysicsRequires access

Effects of trench oxide and field plates on the breakdown voltage of SOI LDMOSFET

Hoon-Soo Park

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Key concepts: Breakdown voltage, Trench, Materials science, LDMOS, Optoelectronics, Silicon on insulator, Voltage, Electric field

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Effects of trench oxide and field plates on the breakdown voltage of SOI LDMOSFET — Research Paper | ScholarLens