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2000•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsRequires access

High-current ECR ion source

G. G. Voronin, D. A. Solnyshkov, M. P. Svin'in, A.I. Solnyshkov

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Key concepts: Ion source, Ion beam deposition, Current (fluid), Ion, Ion gun, Ion current, Ion beam, Materials science

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