2009•Journal of Nanoscience and NanotechnologyRequires access

Nanoindentation and Scratch Studies on Magnetron Sputtered Ti Thin Films

Satender Kataria, R. Ramaseshan, S. Dash, A. K. Tyagi

Abstract

Ti thin films sputter deposited on D9 steel at two different temperatures were studied for their mechanical behavior under static and sliding contact conditions using nanoindentation and scratch tests. The film hardness measured at the surface of the coatings exhibited a value of 2.5 GPa, for both conditions. From the scratch test, it is understood that coatings deposited at 200 degrees C substrate temperature showed superior adhesion strength. Critical load to failure for these coatings was evaluated at 2 N.

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Key concepts: Nanoindentation, Materials science, Scratch, Composite material, Thin film, Sputter deposition, Substrate (aquarium), Adhesion