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2002•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access

Detection of optical field by near-field scanning optical microscopy

Tiejun Xu, Jiying Xu, Jia Wang, Dong Pan, Liqun Sun, Qian Tian

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Abstract

Based on theory and method of the near-field optics, optical resolution of near-field scanning optical microscopy (NSOM) is beyond the classical optical diffraction limit and down to tens of nanometer or even less. In this paper, a collection mode NSOM is built to detect and analyze local near-field distribution. The output optical field of a standard 1μm×1μm scale 2D grating has been detected. This NSOM system can also be used to study local near-field distribution of the focused spot of solid immerging lens (SIL) and the result can be directly used to evaluate SIL and compared with the calculation of its theoretical model and as a result, to improve the theoretical model.

About this research paper

What this paper is about

Based on theory and method of the near-field optics, optical resolution of near-field scanning optical microscopy (NSOM) is beyond the classical optical diffraction limit and down to tens of nanometer or even less. In this paper, a collection mode NSOM is built to detect and analyze local near-field distribution. The output optical field of a standard 1μm×1μm scale 2D grating has been detected. This NSOM system can also be used to study local near-field distribution of the focused spot of solid immerging lens (SIL) and the result can be directly used to evaluate SIL and compared with the calculation of its theoretical model and as a result, to improve the theoretical model.

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Available abstract

Based on theory and method of the near-field optics, optical resolution of near-field scanning optical microscopy (NSOM) is beyond the classical optical diffraction limit and down to tens of nanometer or even less. In this paper, a collection mode NSOM is built to detect and analyze local near-field distribution. The output optical field of a standard 1μm×1μm scale 2D grating has been detected. This NSOM system can also be used to study local near-field distribution of the focused spot of solid immerging lens (SIL) and the result can be directly used to evaluate SIL and compared with the calculation of its theoretical model and as a result, to improve the theoretical model.

Key concepts: Optical microscope, Field (mathematics), Near-field scanning optical microscope, Microscopy, Optics, Materials science, Optoelectronics, Physics

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