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2010•Nano LettersRequires access

Standardless Atom Counting in Scanning Transmission Electron Microscopy

James M. LeBeau, Scott D. Findlay, Leslie J. Allen, Susanne Stemmer

Open publisher page 227 citations

Abstract

We demonstrate that high-angle annular dark-field imaging in scanning transmission electron microscopy allows for quantification of the number and location of all atoms in a three-dimensional, crystalline, arbitrarily shaped specimen without the need for a calibration standard. We show that the method also provides for an approach to directly measure the finite effective source size of a scanning transmission electron microscope.

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What this paper is about

We demonstrate that high-angle annular dark-field imaging in scanning transmission electron microscopy allows for quantification of the number and location of all atoms in a three-dimensional, crystalline, arbitrarily shaped specimen without the need for a calibration standard. We show that the method also provides for an approach to directly measure the finite effective source size of a scanning transmission electron microscope.

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OpenAlex reports 227 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

We demonstrate that high-angle annular dark-field imaging in scanning transmission electron microscopy allows for quantification of the number and location of all atoms in a three-dimensional, crystalline, arbitrarily shaped specimen without the need for a calibration standard. We show that the method also provides for an approach to directly measure the finite effective source size of a scanning transmission electron microscope.

Key concepts: Scanning transmission electron microscopy, Dark field microscopy, Scanning confocal electron microscopy, Conventional transmission electron microscope, Energy filtered transmission electron microscopy, Electron tomography, Transmission electron microscopy, Scanning electron microscope

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