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2000•Journal of Non-Crystalline SolidsRequires access

Pulsed laser crystallization and doping for thin film transistors

Ping Mei, James B. Boyce, Jinzhong Lu, Jacob Y. L. Ho, R. T. Fulks

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Key concepts: Materials science, Thin-film transistor, Amorphous silicon, Optoelectronics, Excimer laser, Doping, Substrate (aquarium), Silicon

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