2004•Thin Solid FilmsRequires access

Fabrication of nanofigures by focused electron beam-induced deposition

Kazuyuki Ueda, Masamichi Yoshimura

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Key concepts: Electron beam-induced deposition, Scanning electron microscope, Field electron emission, Energy-dispersive X-ray spectroscopy, Deposition (geology), Substrate (aquarium), Materials science, Electron-beam lithography

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