2013•Journal of Mechanical Science and TechnologyRequires access

Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer

Yulong Zhao, Xiaobo Li, Jing Liang, Zhuangde Jiang

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Key concepts: Accelerometer, Piezoresistive effect, Microelectromechanical systems, Hammer, Shock (circulatory), Silicon on insulator, Materials science, Acoustics

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Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer — Research Paper | ScholarLens