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2013•Unpublished venueRequires access

Multi-functional MEMS/NEMS for nanometrology applications

Ling Hao, John Gallop, Mark Stewart, K. Lees, Jie Chen

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Abstract

As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.

About this research paper

What this paper is about

As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.

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Available abstract

As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.

Key concepts: Nanometrology, Nanoelectromechanical systems, Microelectromechanical systems, Computer science, Nanotechnology, Nanosensor, Engineering, Electronic engineering

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