2013•UltramicroscopyRequires access

3D analysis of advanced nano-devices using electron and atom probe tomography

Adeline Grenier, S. Duguay, Jean‐Paul Barnes, R. Serra, Georg Haberfehlner, David Cooper, F. Bertin, Sylvain Barraud, G. Audoit, L. Arnoldi, E. Cadel, Amal Chabli, F. Vurpillot

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Key concepts: Atom probe, Electron tomography, Tomography, Materials science, Nanowire, Electron, Nanometre, Atom (system on chip)