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The Fabrication of Bio-Inspired Chemical Vapor Sensors via Plasma Enhanced Chemical Vapor Deposition

Jesse Enlow, Daniel M. Gallagher, Hao Jiang, Lawrence L. Brott, Rachel Jakubiak, Rajesh R. Naik, Timothy J. Bunning

Abstract

Plasma enhanced chemical vapor deposition (PECVD) of biologically active films is investigated for the fabrication of bio-inspired chemical vapor sensors, due to the ability to fabricate thin films with unique surface chemistries.

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Available abstract

Key concepts: Plasma-enhanced chemical vapor deposition, Chemical vapor deposition, Fabrication, Combustion chemical vapor deposition, Materials science, Plasma processing, Thin film, Nanotechnology