2001•Journal of Vacuum Science & Technology A Vacuum Surfaces and FilmsRequires access

Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling

R. M. Langford, A. K. Petford‐Long

Abstract

The preparation of transmission electron microscopy cross-section specimens using focused ion beam milling is outlined. The “liftout” and “trench” techniques are both described in detail, and their relative advantages and disadvantages are discussed. Artifacts such as ion damage to the top surface and sidewalls of the cross-section specimens, and methods of reducing them, are addressed.

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Key concepts: Focused ion beam, Ion milling machine, Transmission electron microscopy, Cross section (physics), Materials science, Ion beam, Trench, Beam (structure)