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2006•Journal of MicroscopyRequires access

Nanoscale scanning transmission electron tomography

Paul A. Midgley, Matthew Weyland, Timothy Yates, I. Arslan, Rafal E. Dunin‐Borkowski, James M. Thomas

Open publisher page 46 citations

Abstract

Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.

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What this paper is about

Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.

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OpenAlex reports 46 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.

Key concepts: Electron tomography, Scanning transmission electron microscopy, Scanning confocal electron microscopy, Nanoscopic scale, Tomography, Conventional transmission electron microscope, Transmission electron microscopy, Energy filtered transmission electron microscopy

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