Silicon Compounds, Silicon Halides

Abstract All of the halogens form single and mixed silicon halides. Monomeric silicon halides and halohydrides are generally tetrahedral compounds. A large number of halogenated polysilanes are also known. The only compounds of industrial importance are tetrachlorosilane and trichlorosilane. Both are used as precursors: the former primarily for high purity fumed silica; the latter for organosilanes and semiconductor‐grade silicon metal. Dichlorosilane, a by‐product of the other chlorosilanes, also finds use in the semiconductor industry.