Catalytic hydrogenation of silicon tetrachloride to trichlorosilane

Using HZSM-5 as the support and different metal chlorides as the active components,the different supported catalysts for hydrogenation of silicon tetrachloride to trichlorosilane were prepared by impregnation method.The as-prepared catalysts were characterized by XRD,XPS and BET.The activity of the catalysts was investigated.The results showed that the chlorides of alkaline earth metal,especially barium,exhibited better catalytic activity for the hydrogenation of silicon tetrachloride;the maximum conversion of silicon tetrachloride of 20.22% and the highest selectivity to trichlorosilane of 83.01% were attained under the condition of reaction temperature 850 ℃ and BaCl2 loading 1%(mass fraction)