2003•Unpublished venueRequires access
A fully-packaged silicon micromachined piezoresistive accelerometer
Kevin Walsh, H. Thurman Henderson, Gregory N. De Brabander
Open publisher page 5 citations
Abstract
The design and development of a second-generation miniature piezoresistive micromachined accelerometer are presented. Bulk micromachining etching techniques were utilized in the fabrication of the single-crystalline silicon device. The sensor is essentially its own package, consisting of three carefully aligned