1985•Chinese Journal of PhysicsRequires access

The Outgassing and Pumping Effect of an Ultrahigh Vacuum System

Y. C. Liu, Sheng‐Tang Wu, J. R. Chen, H. S. Tzeng

Abstract

An ultimate pressure of 4 x 10”^2 Torr was reached in a locally made SUS304 stainless steel vacuum chamber. Ion pump, titanium sublimation pump and non-evaporable getter pump were used in the system. The pumping and outgassing effects of the pumps were studied. The pumping effect of gauages and a Ti-ball during preheating procedures were observed. Outgassing during bakeout and after pumps off were also studied in this work.

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Key concepts: Outgassing, Getter, Sublimation (psychology), Materials science, Torr, Vacuum pump, Ion pump, Ultra-high vacuum