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Physical and Metallorganic Chemical Vapor Deposition of Ferroelectric Thin Films for Nonvolatile Memories

Orlando H. Auciello, Carmen M. Foster, R RAMESH

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Key concepts: Ferroelectricity, Materials science, Chemical vapor deposition, Thin film, Metalorganic vapour phase epitaxy, Capacitor, Nanotechnology, Pulsed laser deposition

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Physical and Metallorganic Chemical Vapor Deposition of Ferroelectric Thin Films for Nonvolatile Memories — Research Paper | ScholarLens