Current applications of silicon based microsystems

A short overview will be given concerning recent advances in micromachining technology, including surface and bulk silicon micromachining, galvano deposition and bonding techniques. Following this short overview, a number of examples dealing with the design, fabrication and application of microsystems will be presented. In particular the following microsystems will be discussed in detail: (1) miniaturized chemical analysis systems; (2) micro instrumentation for space research; (3) miniaturized fluid handling systems; (4) scanning probe systems; (5) electrostatic and ultrasonic millimotors; (6) micro opto-mechanical systems.