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2010•University of Twente Research InformationOpen access

Fabrication of cantilever arrays with tips for parallel optical readout

Wabe W. Koelmans, Tjitte-Jelte Peters, Léon Abelmann, Michael Curt Elwenspoek

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Abstract

We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.

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What this paper is about

We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.

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Available abstract

We report on progress in the fabrication of cantilever arrays with tips. The process features only one lithographic step for the definition of both the tips and cantilevers. The tips have a uniform height distribution and are placed by selfalignment on the cantilever. The arrays are fabricated for an optical readout technique under development in which the cantilever arrays serve as diffraction gratings. This work describes our ongoing effort in array fabrication as well as preliminary results on optical readout of a previously fabricated batch of tipless cantilever arrays using Fraunhofer diffraction.

Key concepts: Cantilever, Fabrication, Materials science, Lithography, Diffraction, Nanotechnology, Optics, Optoelectronics

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